Shon-Roy, Lita; Allan Wiesnoski; Robert Zorich: Advanced Semiconductor Fabrication Handbook

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Shon-Roy, Lita; Allan Wiesnoski; Robert Zorich : Advanced Semiconductor Fabrication Handbook

Integrated Circuit Engineering, 1998

ISBN 1877750700

4to - over 9¾ - 12" tall. 1877750700 | INCLUDES CD-ROM | 3-Ring Binder Hardcover. Usual library markings. Divided into the sections: Silicon-Material Characteristics and Device Physics; Design and Products; Substrate Crystallography and Preparation; Thermal and Dopant Processes; Deposited Films and Planarization Processes; Photolithography Processes; Wet Chemical Processing; Dry Etching; MOS Processing; Manufacturing Trends and Process Control Issues; Test, Assembly and Packaging.. Book. Book Condition: Very Good Ex-Library Condition. Binding: Hardcover

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